- Interconnect
• Metallization & Low-k Dielectrics
• Thin Film Deposition for Interconnect: ALD, Plating, Sputtering, PECVD, Spin-on Dielectrics, etc.
• Planarization Technology for Dielectrics and Metal
• Silicides, Contact, Barrier, Plug Materials
• Process Integration, Modeling, Simulation & Reliability for Interconnect
• Passive Component Integration and Characterization
• New Concept Interconnect (Optical, RF, Microwave,magnetic, etc.)
• Novel Interconnect Materials including CNT, Graphene, Nanowire, etc.
• Interconnect for Other Devices: Transparent Conducting Oxides, Roll-to-Roll Processing, Printing Process, etc
- Package
• Electronic packaging materials & Processes
• Electronic packaging Design, Simulation & Reliability Test
• 3D and 2.5D packages
• Emerging Packaging Technologies
• Test (wafer-level test, packaging-level test)
• Fan-out WLP/PLP