시상식은 KCS 2025에서 진행될 예정입니다.
발표자 분들께 메일로 선정 안내되었으며, 시상식에 대한 자세한 일정 및 내용은 추후 재 안내 드리겠습니다.
최우수논문상
[발표기호: FD3-F-2]
CMOS-compatible Room-temperature Waveguide-integrated Photodetector based on Ge-on-insulator Photonic Platform for Mid-infrared Applications
Joonsup Shim, Jinha Lim, Inki Kim, and SangHyeon Kim
KAIST
[발표기호: FG2-K-3]
고분자 iCVD 증착 기술을 이용한 불소 도핑에 의한 a-InGaZnO 박막 트랜지스터 소자 특성 향상
오승현1, 이창현2, 조성행3, 김희태1, 박정익2, 김민주4, 박영근1, 정민규5, 박세준5, 임성갑2, 조병진1
1한국과학기술원 전기 및 전자공학부, 2한국과학기술원 신소재공학부, 3한국전자통신연구원 플렉시블전자소자연구실, 4단국대학교 전자전기공학부, 5Samsung Electronics Co., Ltd.
우수논문상
[발표기호: TJ1-A-1]
나노 초 레이저 어닐링을 이용한 비아 플러그의 결정립 크기 증가
정재중1, 박영근1, 백용구1, 김희태1, 김동빈1, 김환욱2, 조병진1
1한국과학기술원 전기 및 전자공학부, 2한국기초과학지원연구원 소재분석연구부
[발표기호: FH2-K-7]
The Effect of Oxygen Vacancy Layer on Memory Performance of Hafnia Ferroelectric Tunnel Junction
Junghyeon Hwang, Chaeheon Kim, Hunbeom Shin, and Sanghun Jeon
School of Electrical Engineering, KAIST
기업체상
SK하이닉스상
[발표기호: TE3-N-4]
Impact Analysis of Coupling Effect Induced by Through-silicon Via for Static Timing Analysis in 3D IC
Euntaek Oh, Mujun Choi, and Juho Kim
Sogang University
[발표기호: TI2-D-5]
Fabrication of MoO2 Electrode by Thermal Atomic Layer Deposition for High-performance TiO2-Based DRAM Capacitors
Jae Hyeon Lee, Wangu Kang, Jeong Eun Shin, and Jeong Hwan Han
Department of Materials Science and Engineering, Seoul National University of Science and Technology
삼성
[발표기호: WC1-C-4]
Ferroelectricity of Hf0.5Zr0.5O2 Thin Film Induced at 350 ℃ by Thermally Accelerated Nucleation during Atomic Layer Deposition
Jaewook Lee1,2, Se Hyun Kim1,2, Younghwan Lee3, Sang-Youn Park4, and Min Hyuk Park1,2,3
1Department of Materials Science and Engineering, Seoul National University, 2Inter-University Semiconductor Research Center, Seoul National University, 3Research Institute of Advanced Materials College of Engineering, Seoul National University, 4Pohang Accelerator Laboratory, POSTECH
[발표기호: FE2-E-2]
Lg = 50 nm AlGaN/GaN HEMTs on 4-inch SiC with fmax > 300 GHz
Wan-Soo Park1, Hyo-Jin Kim1, Hyeok-Jun Lee1, Sang-Kuk Kim2, Jacob Yun2, Ted Kim2, Jae-Hak Lee1, Kyounghoon Yang3, and Dae-Hyun Kim1
1Kyungpook National University, 2QSI, 3KAIST
DB하이텍
[발표기호: TK2-G-1]
Neural Network-Assisted Acceleration of Full-Band Semi-Classical Monte Carlo Carrier Transport Simulation
Dong Hyeok Lee1 and Jiwon Chang1,2
1Department of Materials Science and Engineering, Yonsei Universit, 2Department of System Semiconductor Engineering, Yonsei University
[발표기호: TH3-S-1]
Design of Single-ended PAM-3 Transmitter with Crosstalk Cancellation Scheme for Memory Interface
Dongwoo Kang and Kwanseo Park
Yonsei University
CDC 우수설계상
[발표기호: TH3-S-2]
Design Points of Period-modulation Capacitance-to-digital Converter for Continuous Glucose Monitoring System
Donghyun Youn and Minkyu Je
School of Electrical Engineering, KAIST
[발표기호: TH3-S-4]
Hardware Implementation of a CNN-based Accurate and Efficient 3D Hand Pose Estimator
Yongsoo Kim1, Wencan Chen2, Jaehyeon So3, Siyeon Kim3, Chanwook Hwang3, Jong Hwan Ko3, and Jaehyuk Choi3
1Department of Semiconductor and Display Engineering, Sungkyunkwan University, 2Department of Artificial Intelligence, Sungkyunkwan University, 3Department of Electrical and Computer Engineering, Sungkyunkwan University
SSCS 서울챕터 특별상
[발표기호: TH3-S-1]
Design of Single-ended PAM-3 Transmitter with Crosstalk Cancellation Scheme for Memory Interface
Dongwoo Kang and Kwanseo Park
Yonsei University
우수포스터상
[발표기호: FP1-385]
Design of 16Gb/s/pin 8-Channel Transceiver Using Multiwire Signaling Technique with Skew Compensation for Memory Interface
Sinho Lee, Daeun Yun, Junhak Kim, and Kwanseo Park
Yonsei University
[발표기호: FP1-006]
ALD ZnO 확산방지층이 Cu와 Ru 배선의 계면접착에너지에 미치는 영향
정대윤1,2, 김가희1,2, 김민진1,2, 손예슬3, Yuki Mori3,4, 김수현3,5, 박영배1,2
1안동대학교 신소재공학부, 2안동대학교 청정에너지 소재기술연구센터, 3울산과학기술원 반도체 소재부품 대학원, 4Chemical Materials Development Department, TANAKA Precious Metals, 5울산과학기술원 신소재공학과
** 분과 별 현장우수포스터상은 이미 각 발표자분들께 사전 발송 완료 되었습니다.
A. Interconnect & Package
[발표기호: A_2030]
Electrochemical Study on Better Controllability of Cu Pad Topography in Cu/Ti CMP
Seonwoo Go1, Yoonji Ra1, Jenasree Hazarika1, Jum-Yong Park2, Un-Byoung Kang2, Tae-Gon Kim1, and Jin-Goo Park1
1Department of Materials Science and Chemical Engineering, Hanyang University ERICA, 2AVP Process Development Team, Samsung Electronics Co., Ltd.
B. Patterning (Lithography & Etch Technology)
[발표기호: TA2-B-2]
Contact-hole Reduction Using Advanced Cyclic Etching Process in Heptafluoropropyl Methyl Ether Plasmas
유상현1,2, 김창구1,2
1Department of Chemical Engineering, Ajou University, 2Department of Energy Systems Research, Ajou University
C. Material Growth & Characterization
[발표기호: TF1-C-5]
Thermal Property 3D Imaging System Using Frequency-domain Thermoreflectance
Jihyun Kim, Jongwon Baek, and Jungwan Cho
Sungkyunkwan University
D. Thin Film Process Technology
[발표기호: FJ2-D-1]
Performance Enhancement of In-Ga-Zn-O Vertical-channel TFTs with a Channel Length of 40 nm via Al2O3 Spacer Engineering
Chae-Eun Oh1, Young-Ha Kwon2, Nak-Jin Seong2, Kyu-Jeong Choi2, and Sung-Min Yoon1
1Kyung Hee University, 2NCD Co., Ltd.
E. Compound Semiconductors
[발표기호: FE3-E-2]
Enhancing Carrier Transport In AIGaN/GaN HEMTs Through Structural Optimization And Transconductance Modeling
Hyo-Joung Kim, Walid Amir, Surajit Chakraborty, Hyeon-Cheol Jeong, Myeong-Jun You, and Tae-Woo Kim
School of Electrical and Electronic Engineering, University of Ulsan
F. Silicon and Group-IV Devices and Integration Technology
[발표기호: FD2-F-3]
Steep Slope Transistor with Negligible Hysteresis Achieved through Transient Negative Capacitance
Sangho Lee, Giuk Kim, Hunbeom Shin, Yunseok Nam, and Sanghun Jeon
School of Electrical Engineering, KAIST
G. Device & Process Modeling, Simulation and Reliability
[발표기호: TK2-G-2]
Cation Disorder Limited IGZO Mobility Calculation based on Density Functional Theory
Seung Hyo Han, Deokhwa Seo, and Mincheol Shin
School of Electrical Engineering, KAIST
H. Display and Imaging Technologies
[발표기호: TB1-H-5]
Vertically Stacked RGB Micro-LEDs Via Transfer Printed Semiconductor Sheets
Seong Woo Hong and Yei Hwan Jung
Department of Electronic Engineering, Hanyang University
I. MEMS & Sensor Systems
[발표기호: FF3-I-7]
Modulative Artificial Nociceptor based on Double Charge Trap Layer Structure
Geunyoung Kim and Kyung Min Kim
Department of Materials Science and Engineering, KAIST
J. Nano-Science & Technology
[발표기호: TC1-J-2]
NMOS Inverter based on Vertically Stacked MoS2 n-MOSFET Using Semi-metallic PtSe2 Contacts
Jae Eun Seo1, Minseung Gyeon2, Jisoo Seok1, Kibum Kang2, and Jiwon Chang1
1Department of System Semiconductor Engineering and Department of Materials Science and Engineering, Yonsei University, 2Department of Materials Science and Engineering, KAIST
K. Memory (Design & Process Technology)
[발표기호: FH3-K-4]
A Strategy for Controlling Imprint Field in Hafnia Ferroelectric Device
Hunbeom Shin, Junghyeon Hwang, Giuk Kim, Sangho Lee, Lingwei Zhang, Hyojun Choi, Sujeong Lee, and Sanghun Jeon
School of Electrical Engineering, KAIST
L. Analog Design
[발표기호: TA1-L-6]
A 2nd Order Delta-sigma Modulator for BMS DC Measurement
Ji-Ho Park, Jae-Geun Lim, Hyoung-Jung Kim, Jae-Hyuk Lee, Seong-Bo Park, Byeong-Ho Yu, and Gil Cho Ahn
Department of Electronic Engineering, Sogang University
M. RF and Wireless Design
[발표기호: TC3-M-1]
N-path Filter-Based Wideband CMOS Low-Noise Amplifier
Juhui Jeong, Yujung Kim, Junhyeop Kim, and Junghwan Han
Department of Radio and Information Commnucations Engineering, Chungnam National University
N. VLSI CAD
[발표기호: FE1-N-6]
Automated Bitstream Analysis Method for FPGA Reverse Engineering
Mannhee Cho1, Dongchan Lee2, Sanghyun Lee2, Youngmin Kim2, and Hyung-Min Lee1
1Korea University, 2Hongik University
O. System LSI Design
[발표기호: FB1-O-3]
Space-Time Transformation을 이용한 Systolic Tensor Array 분석
이동훈, 박지호, 유호영
충남대학교 전자공학과
P. Device for Energy (Solar Cell, Power Device, Battery, etc.)
[발표기호: TD1-P-2]
Microstructure Design of n-type Bi2Te3 Alloys via Selective Dissolution of KCl: Influence of Bi2TeO5 Formation over an Eutectic Point
Gwang Min Park1,2, Seunghyeok Lee2,3, Jun-Yun Kang4, Seung-Hyub Baek2, Heesuk Kim1, Jin-Sang Kim1, and Seong Keun Kim1,2
1KU-KIST, Korea University, 2KIST, 3Hanyang University, 4Korea Institute of Materials Science
Q. Metrology, Inspection, Analysis, and Yield Enhancement
[발표기호: FL2-Q-7]
Anomaly Classification for Multivariate Time-Series with Noisy Labels: A Semi-Supervised Approach
Jun Hui Lee and PooGyeon Park
Department of Electrical Engineering, POSTECH
R. Semiconductor Software
[발표기호: FA3-R-2]
Eyana: The SSD Simulator Exploring the Inner Workings of Solid-State Drives
Habibur Rahman1, Jaeho Kim1, and Omar Faroque2
1Department of AI Convergence Engineering, Gyeongsang National University, 2Department of Computer Science, University of Texas at Austin
S. Chip Design Contest
[발표기호: TH3-S-2]
Design Points of Period-modulation Capacitance-to-digital Converter for Continuous Glucose Monitoring System
Donghyun Youn and Minkyu Je
School of Electrical Engineering, KAIST
T. AI
[발표기호: FC3-T-5]
Column-Major and Input-Stationary Mapping for Efficient In-memory Inference of Depth-Wise Convolutional Layers
Juhong Park and Jong Hwan Ko
Department of Electrical and Computer Engineering, Sungkyunkwan University
U. Bio-Medical
[발표기호: FH1-U-5]
A 2nd-Order Δ2 -ΔΣ Modulation Based Current Sensing Front-End in Energy and Area Efficient form Factor with Dual PWM Current DAC
Jee-Ho Park, Ji-Hyoung Cha, and Seong-Jin Kim
UNIST
V. Quantum Technology
[발표기호: TL2-V-5]
Chaotic Motion of a Trapped-Ion Nonlinear Mechanical Oscillator
Myunghun Kim, Junhee Cho, Sehyeon Gwon, Keumhyun Kim, Hyegoo Lee, and Moonjoo Lee
Department of Electrical Engineering, POSTECH
** 분과 별 현장우수포스터상은 이미 각 발표자분들께 사전 발송 완료 되었습니다.
A. Interconnect & Package
[발표기호: FP1-002]
Potential Use of Fly Cutting Method for Cu/Polymer Planarization in Hybrid Bonding
Sangmin Lee1, Suin Jang2, Sangwoo Park1, and Sarah Eunkyung Kim1
1Department of Semiconductor Engineering, Seoul National University of Science and Technology, 2Research Center for Advanced Semiconductor Packaging, Seoul National University of Science and Technology
[발표기호: FP1-006]
ALD ZnO 확산방지층이 Cu와 Ru 배선의 계면접착에너지에 미치는 영향
정대윤1,2, 김가희1,2, 김민진1,2, 손예슬3, Yuki Mori3,4, 김수현3,5, 박영배1,2
1안동대학교 신소재공학부, 2안동대학교 청정에너지 소재기술연구센터, 3울산과학기술원 반도체 소재부품 대학원, 4Chemical Materials Development Department, TANAKA Precious Metals, 5울산과학기술원 신소재공학과
[발표기호: FP1-021]
3D Printing of Through-Hole-Embedded Organic Interposer Substrates
Guk Cho1, Haksoon Jung1,2, Yechan Han1, Seongmin Eum1, and Jimin Kwon1
1Department of Electrical Engineering, UNIST, 2Department of Chemical Engineering, POSTECH
B. Patterning (Lithography & Etch Technology)
[발표기호: FP1-037]
Selective Etch of Boron-Doped Silicon Hard Mask Using Chlorine-Based Reactive Ion Etching Process
Sangbae Lee1, Heeju Ha1, Hojin Kang1, Hyeongwu Lee2, Minsung Jeon3, and Heeyeop Chae1,2,3
1School of Chemical Engineering, Sungkyunkwan University, 2Department of Nano Science and Technology, SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, 3Department of Semiconductor Convergence Engineering, Sungkyunkwan University
[발표기호: FP1-038]
Fluoro-alcohol Plasma에서 방전 가스 Chemistry에 따른 SiO2 식각 특성 비교
양현석1,2, 유상현1,2, 김창구1,2
1Department of Chemical Engineering, Ajou University, 2Department of Energy Systems Research, Ajou University
[발표기호: FP1-040]
EUV 마스크 용 Pt 기반 흡수 소재 식각 성능
김연수1,2, 정동민1,2, 이승호1,2, 안진호1,2
1한양대학교 신소재공학과, 2EUV-IUCC
[발표기호: FP1-058]
The Theoretical Study of the Decomposition Mechanism of C2HF5 and C4F8O.
Mihyeon Cho and Sangheon Lee
Department of Chemical Engineering and Materials Science, Ewha Womans University
C. Material Growth & Characterization
[발표기호: FP1-070]
Analysis of Ar/H2S Inductively Coupled Plasma Reaction Using Global Model for MoS2 Synthesis
Nayoon Kang1, Tae-Hyun Kim2, and Eun-Ho Lee1,2
1Department of Mechanical Engineering, Sungkyunkwan University, 2Department of Smart Fab. Technology, Sungkyunkwan University
[발표기호: FP1-073]
Growth of HfSe2 with in-situ BN Passivation for Improved Electrical Properties
Jung Dae Lee and Sanghan Lee
GIST
[발표기호: FP1-075]
P형 Tellurium FET의 저온 특성 분석
김민재1,2, 이용수1,2, 김규헌1,2, 김승모1,2, 이해원1,2, 전재현1,2, 황현준1,2, 이병훈1,2
1CSTC, POSTECH, 2Department of Electrical Engineering, POSTECH
D. Thin Film Process Technology
[발표기호: TP1-009]
Influence of TiO2 Thin Film Grown by Atomic Layer Deposition on N-Type Bi2Te3Se0.3 Thermoelectric Powders
Su Min Eun1, Ji Hyeon Hwang2, and Byung Joon Choi1
1Department of Material Science and Engineering, Seoul National University of Science and Technology, 2Department of Optometry, Seoul National University of Science and Technology
[발표기호: TP1-018]
Multi-stack Ferroelectric Capacitor based on Fluorite Structure Materials for Neuromorphic Computing
Hyo-Bae Kim and Ji-Hoon Ahn
Department of Materials Science and Chemical Engineering, Hanyang University
[발표기호: TP1-022]
High-performance of Hydrogenated Spinel Phase InZnSnO Thin-Film Transistors
Gwang-Bok Kim and Jae Kyeong Jeong
Department of Electronic Engineering, Hanyang University
[발표기호: TP1-026]
Optimization of Al-doped HfO2/ZrO2 Layered Structure for Improving Electrical Characteristics
Yeon-Ji Jeon, Seung Won Lee, and Ji-Hoon Ahn
Department of Materials Science and Chemical Engineering, Hanyang University
[발표기호: TP1-029]
Inducing the Tetragonal-phase HfO2 in ZrO2/HfO2 Stack by Introducing the Controlled Interfacial Layer
Woo Young Park1,2, In kyu Lee1,2, Young Uk Ryu1,2, and Woojin Jeon1,2
1Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, 2Integrated Education Program for Frontier Science & Technology (BK21 Four), Kyung Hee University
[발표기호: TP1-045]
수직 적층 공정을 이용한 ZnO/Te 상보형 전계 효과 트랜지스터
김기영1,2, 김민재1,2, 이용수1,2, 이해원1,2, 전재현1,2, 윤성빈1,2, 황현준1,2, 이병훈1,2
1CSTC, POSTECH, 2Department of Electrical Engineering, POSTECH
[발표기호: TP1-046]
Stable Ferroelectric Properties of Sub-5 nm Hafnium-Zirconium-Oxide Thin Films Deposited via Atomic Layer Deposition
Gunho Kim1, Hyo-Bae Kim1, Wonwoo Kho2, Yoomi Kang2, Seung-Eon Ahn3, and Ji-Hoon Ahn3
1Department of Materials Science and Chemical Engineering, Hanyang University, 2Department of IT·Semiconductor Convergence Engineering, Tech University of Korea, 3Department of Nano & Semiconductor Engineering, Tech University of Korea
[발표기호: TP1-051]
Achieving Molecular Alignment in Semiconducting Polymers: A Step Towards Improved Electrical Performance
Jin Seok Yoon, Nak Hee Kang, Sam Nyung Yi, Hyung Soo Ahn, Kyung Hwa Kim, and Young Tea Chun
Division of Electronics and Electrical Information Engineering, Korea Maritime and Ocean University
[발표기호: TP1-065]
Accurate Regulation of Dopant Distribution in both Lateral and Vertical Directions in Sn-doped In2O3 Grown via Atomic Layer Deposition
Tae Seok Kim1,2, Han Kim1,2, and Seong Keun Kim1,2
1KU-KIST Graduate School of Converging Science and Technology, Korea University, 2Electronic Materials Research Center, KIST
[발표기호: TP1-080]
Effects on Electrical Properties of TiO2-Based Capacitors by Improving Bulk and Interface Properties
Taehyun Kim1, Daeun Lim2, Juan Hong2, and Woongkyu Lee1,2
1Department of Green Chemistry and Materials Engineering, Soongsil University, 2Department of Materials Science and Engineering, Soongsil University
[발표기호: TP1-085]
Atomic Layer Deposition of Ir Thin Films with Tricarbonyl (1,2,3,-η)-1,2,3-tri(tert-butyl)-cyclopropenyl Iridium (TICP) and O3
Han Kim1,2, Hong Keun Chung2,3, Tae Seok Kim1,2, and Seong Keun Kim1,2
1KU-KIST Graduate School of Converging Science and Technology, Korea University, 2Electronic Materials Research Center, KIST, 3Department of Materials Science and Chemical Engineering, Hanyang University
[발표기호: TP1-087]
Controlling Electrical Properties of ZrO2-Based Metal-Insulator-Metal Capacitor via Gd Doping without Sacrificing Tetragonality
Seungwoo Lee1,2, Yoona Choi1,2, Jonghwan Jeong1,2, Jihun Nam1,2, Han sol Oh3, Hanbyul Kim3, Yongjoo Park3, and Woojin jeon1,2
1Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, 2Integrated Education Program for Frontier Science & Technology (BK21 Four), Kyung Hee University, 3Advanced Research Development Team, SK Trichem Co., Ltd.
[발표기호: TP1-092]
Strategies for Precision Control of the Interfacial Layer in ZrO2(or HfO2)/TiN Structures for DRAM Capacitors
Myoung Su Jang1,2, Ji Hoon Jeon1,2, Taikyu Kim2, and Seong Keun Kim1,2
1KU-KIST Graduate School of Converging Science and Technology, Korea University, 2Electronic Materials Research Center, KIST
[발표기호: TP1-111]
Improved DRAM Electrode/Dielectric Interface Properties Using Nb2O5 and Ta2O5 Ultrathin Layer
Yong ju Kwon, Woo hyuk Kim, and Woo-Hee Kim
Department of Materials Science and Chemical Engineering, BK21 FOUR ERICA-ACE Center, Hanyang University
[발표기호: TP1-114]
Morphology Engineering in Mo-Hf0.5Zr0.5O2-Mo metal-ferroelectric-metal Capacitor with Surface Pre-treatment
Seung Yeon Kim, Dong Hee Han, and Woojin Jeon
Department of Advanced Materials Engineering for Information and Electronics, Integrated Education Program for Frontier Science & Technology (BK21 Four), Kyung Hee University
E. Compound Semiconductors
[발표기호: FP1-093]
Growth of Ge-AlN Hexa-cone Core-shell Microneedles by AlN Nanowires
Suhyun Mun1, Seonwoo Park1, Kyoung Hwa Kim1, Hyung Soo Ahn1, Jae Hak Lee1,2, Min Yang1, Young Tea Chun1, Sam Nyung Yi1, Yeon-Suk Jang3, Won Jae Lee3, Myeong-Cheol Shin4, and Sang-Mo Koo4
1Department of Nano-Semiconductor Engineering, Korea Maritime and Ocean University, 2LNBS Co., Ltd., 3Department of Advanced Materials Engineering, Dong-Eui University, 4Department of Electronic Materials Engineering, Kwangwoon University
[발표기호: FP1-098]
First Demonstration of HZO/β-Ga2O3 Ferroelectric FinFET for High-Performance Power Devices
Seohyeon Park1, Jaewook Yoo1, Hyeonjun Song1, Soyeon Kim1, Hongseung Lee1, Seongbin Lim1, Minah Park1, Peide D. Ye2, and Hagyoul Bae1
1Jeonbuk National University, 2Purdue University
[발표기호: FP1-120]
AlGaN/GaN HD-GIT의 Dynamic Ron 개선 연구
Min-Keun Lee, Jun-hyeok Yim, and Ho-Young Cha
School of Electronic and Electrical Engineering, Hongik University
F. Silicon and Group-IV Devices and Integration Technology
[발표기호: TP1-137]
Analysis on the Impact of Charge Traps in FeTFET
Yun Seo Choi1, Seungwon Go1, Tae-Hyeon Kim2, Sihyun Kim1, and Sangwan Kim1
1Department of Electronic Engineering, Sogang University, 2School of Electrical and Computer Engineering, Georgia Institute of Technology
[발표기호: TP1-143]
An Artificial Multimodal Neuron with Associative Learning Capabilities: Acquisition, Extinction, and Spontaneous Recovery
Sangheon Kim1,2, Unhyeon Kang1,3, Young Woong Lee1, Seungmin Oh1,3, Jaewook Kim1,3, Daseung Jeong1, Jingyeong Hwang1, and Suyoun Lee1,5
1Center for Neuromorphic Engineering, KIST, 2Department of Materials Science and Engineering, Korea University, 3Materials Science & Engineering, Seoul National University, 4Department of Materials Science & Engineering, Seoul National University of Science and Technology, 5Division of Nano & Information Technology, Korea University of Science and Technology
[발표기호: TP1-148]
Non-Uniform Interface Trap Density by Halo Ion-Implantation Process for Flicker Noise Estimation
Yoo Bin Song, Sang Hyo Ahn, Min Jae Kim, Min Woo Ryu, and Kyung Rok Kim
Department of Electrical Engineering, UNIST
[발표기호: TP1-158]
A 28-nm Ternary Dual-Port SRAM Cell for Area and Power Efficient On-chip Memory
Myoung Kim1,2, Young Eun Choi1, Woo-Seok Kim1, Yesong Jeong1, Jun Young Park1, Sang Hun Yeo1, Kwan Yong Lee1, In Jun Jang1, Min Woo Ryu1,2, and Kyung Rok Kim1,2
1Department of Electrical Engineering, UNIST, 2Ternell Corp.
[발표기호: TP1-160]
Heterogeneous Inverter Using N-type IGTO TFT Prepared by Atomic-layer Deposition with Various Channel Compositions on the P-type Si FET
Chan Seul Lee, Sun Bum Kim, Gyu Ri Kim, and Changhwan Choi
Division of Materials Science and Engineering, Hanyang University
G. Device & Process Modeling, Simulation and Reliability
[발표기호: FP1-139]
로직 어플리케이션을 위한 델타전도 스위칭 소자의 scalability 연구
전재현1,2, 이용수1,2, 김기영1,2, 김민재1,2, 이해원1,2, 황현준1,2, 이병훈1,2
1CSTC, POSTECH, 2Department of Electrical Engineering, POSTECH
[발표기호: FP1-149]
Indium Gallium Arsenide Electron and Phonon Properties Study by Density Functional Theory
Tae Hui Lee and Byoung Don Kong
Department of Electrical Engineering, POSTECH
[발표기호: FP1-154]
Ising Machine Based on Ovonic Threshold Switch Oscillator
Young Woong Lee1, Unhyeon Kang1,3, Sangheon Kim1,2, Seungmin Oh1,3, Jaewook Kim1,3, Daseung Jeong1, Jingyeong Hwang1, and Suyoun Lee1,5
1Center for Neuromorphic Engineering, KIST, 2Department of Materials Science and Engineering, Korea University, 3Materials Science & Engineering, Seoul National University, 4Department of Materials Science & Engineering, Seoul National University of Science and Technology, 5Division of Nano & Information Technology, Korea University of Science and Technology
[발표기호: FP1-170]
Switching Performance Improvements of RRAM by Applying Protruding Top Electrode and Utilizing Surface Roughness: Multi-physics Simulations
Jeonghwan Jang and Mincheol Shin
School of Electrical Engineering, KAIST
[발표기호: FP1-174]
Analysis on Drain Current Transient Response in Amorphous InGaZnOx Thin-Film Transistors
Yubin Choi, Haesung Kim, Hyojin Yang, Sejun Park, Junseong Park, Sung-Jin Choi, Dae Hwan Kim, Dong Myong Kim, and Jong-Ho Bae
School of Electrical Engineering, Kookmin University
[발표기호: FP1-179]
Impact of Atomic Arrangements in Te-Based Binary Ovonic Threshold Switches during Switching Process in Local Biasing System
Young-Min Kim1,2, Su-Bong Lee1, Sangyeop Kim1,2, and Jong-Souk Yeo1
1School of Integrated Technology, College of Computing, Yonsei University, 2BK21 Graduate Program in Intelligent Semiconductor Technology
H. Display and Imaging Technologies
[발표기호: FP1-190]
Facile Fabrication of Strain-Insensitive Capacitive Touch Sensor for Stretchable Displays
Geonoh Choe and Yei Hwan Jung
Department of Electronic Engineering, Hanyang University
[발표기호: FP1-192]
Transparent Red OLED Using AZO-Ag-AZO Electrode as Anode
Yong Hyeok Seo1, Won Woo Lee1, Dongwoon Lee1, Dong Gyun Kim1, Young Woo Kim1, Minseong Park2, Ye Ji Shin2, Yongmin Jeon2, Sang Jik Kwon1, and Eou-Sik Cho1
1Department of Electronic Engineering, Gachon University, 2Department of Biomedical Engineering, Gachon University
[발표기호: FP1-204]
Device Feasibility and Process Optimization of Atomic-Layer Deposited Al Doped ZnO Thin Films as Electrodes for Oxide TFT Applications
Ye-Jin Seo1, Young-Ha Kwon2, Nak-Jin Seong2, Kyu-Jeong Choi2, and Sung-Min Yoon1
1Kyung Hee University, 2NCD Co., Ltd.
[발표기호: FP1-206]
Improved Light Extraction Efficiency and Color Control in Quantum Dot LEDs Using Metal-Insulator-Metal (MIM) Structure
Eun Sang Lee1, Hyuntai Kim2, and Seong-Yong Cho1
1Department of Photonics and Nanoelectronics, Hanyang University, 2Department of Electronic and Electrical Convergence Engineering, Hongik University
I. MEMS & Sensor Systems
[발표기호: TP1-174]
Nanoporous MoS2 FET-Based Bioelectric Sensor Capable of Highly Selective and Sensitive Detection of Ethanol by Mimicking Drosophila Olfactory System
Junoh Shim, Anamika Sen, Heekyeong Park, Arindam Bala, Mincheol Park, and Sunkook Kim
Department of Advanced Materials Science and Engineering, Sungkyunkwan University
[발표기호: TP1-183]
마이크로 칩의 선택적 전사를 위한 다공성 스탬프
강가은, 박윤석
경희대학교 정보전자신소재공학과
[발표기호: TP1-192]
인체부착형 마찰전기 기반 움직임 감지 센서
한윤승1, 윤홍준2, 박윤석1
1경희대학교 정보전자신소재공학과, 2가천대학교 전자공학부
[발표기호: TP1-206]
Application of Innovative Wiring Method of in-vivo Experiments
Janghoon Joo and Sang Min Won
Sungkyunkwan University
J. Nano-Science & Technology
[발표기호: FP1-228]
Influence of Oxidation State on Voltage-Controlled Magnetic Anisotropy
Ji-Hyeon Yun1,2, Ji-won Yoon1,2, Hyun-jun Lee1,3, Si-yeol Lee1, Sang-Ho Lim2, and Seung-heon Chris Baek1
1Center for Spintronics, KIST, 2Department of Materials Science and Engineering, Korea University, 3Department of Electrical Engineering, Korea University
[발표기호: FP1-236]
Enhanced Electrostatic Controllability of MoS2 FETs Using Dual Gate Structure
Habin Baek1, Kyungmin Ko2, Chanho Lee2, and Joonki Suh1,2
1Graduate School of Semiconductor Materials and Devices Engineering, UNIST, 2Department of Materials Science and Engineering, UNIST
[발표기호: FP1-242]
Imitation on Signal Degradation Procedure in Neural System with Ferroelectric Neuromorphic Transistor via Photocrosslinking
Young-Seok Song1, Dae-Hong Kim1, Juyoung Jin1, Hyeonji Joo1, Minyoung Seo1, Sneha Bhise1, and Tae-Wook Kim1,2
1Jeonbuk National University, 2Jeonbuk National University -KIST
[발표기호: FP1-247]
2D Reliable Electromagnetic Interference (EMI) Shielding Properties of 2D Copper@Copper Oxide Core-Shell Nanosheets Film
Minyoung Seo1, Seungyeon Kim1, Tae-Wook Kim1,2
1Jeonbuk National University, 2Jeonbuk National University -KIST
[발표기호: FP1-249]
Laterally Stitched 2D Metal-semiconductor Junction with Low Contact Resistance Fabricated by Pd-to-PdTe2 Transition
Jaewoong Joo, Hayeong Sung, Hyunjun Kim, Yoona Kim, Byeongchan Kim, and Gwan-Hyoung Lee
Department of Materials Science and Engineering, Seoul National University
[발표기호: FP1-252]
Multi-terminal Floating Gate Memristor in van der Waals Heterostructures for Unsupervised Learning
Mi Hyang Park and Woo Jong Yu
Department of Electrical and Computer Engineering, Sungkyunkwan University
[발표기호: FP1-270]
Three-terminal Vertical HZO Ferroelectric Synapse for High-performance and Energy-efficient Pattern Recognition
Yongjun Kim1, Seonghoon Jang1, Jihoon Jeon3, Seonggil Ham1, Sanghyeon Choi1, Seong-Keun Kim3, Jingon Jang1, and Gunuk Wang1,2,4
1KU-KIST Graduate School of Converging Science and Technology, 2Department of Integrative Energy Engineering, Korea University, 3Electronic Materials Research Center, KIST, 4Center for Neuromorphic Engineering, KIST
[발표기호: FP1-272]
Modulation of Metal-Insulator Transition in Single-Crystalline VO2 Films for Switching Device Applications
Ki Hoon Shin1, Sumin Jeong1, Eunmin Kim1, Woong-Ki Hong2, and Jung Inn Sohn1
1Division of Physics and Semiconductor Science, Dongguk University, 2Center for Scientific Instrumentation, KBSI
[발표기호: FP1-283]
Complementary 2D Tunnel FETs with Extremely Asymmetric Dual-barrier Heterostructures
Hanbin Cho1, Seonguk Yang1, Donggyu Park2, and Joonki Suh1,2
1Department of Materials Science and Engineering, UNIST, 2Graduate School of Semiconductor Materials and Devices Engineering, UNIST
K. Memory (Design & Process Technology)
[발표기호: FP1-285]
Insertion of an Interfacial Layer for Schottky Barrier Modulation in RRAM Using Finite Element Method
Sagar Khot, Dongmyung Jung, and Yongwoo Kwon
Department of Materials Science and Engineering, Hongik University
[발표기호: FP1-286]
Single-ended Sense Amplifier with Offset Cancellation
Kee Won Kwon and Jin-Gon Oh
Sungkyunkwan University
[발표기호: FP1-319]
Effect of Interfacial SiO2?Layer Thickness on The Memory Performances in The HfAlOx-Based Ferroelectric Tunnel Junction for A?Neuromorphic System
Yongjin Park, Minseo Noh, Seoyoung Park, Suyong Park, Woohyun Park, Jonghyuk Park, Jihee Park, and Sungjun Kim
Division of Electronics and Electrical Engineering, Dongguk University
[발표기호: FP1-321]
스토캐스틱 비트 기반의 스파이킹 뉴럴 네트워크 설계
Hye Yeon- Jeon1, Yoon Kim1, and Min Suk Koo2
1서울시립대학교 전자전기컴퓨터공학과, 2인천대학교 컴퓨터공학부
[발표기호: FP1-328]
A Nonlinear Self-rectifying Synaptic Device Using Molybdenum Disulfide Nanomaterials
Jongho Lim, DongJun Jang, TaeYong Lee, and Min-Woo Kwon
Department of Electric Engineering, Gangneung-Wonju National University
[발표기호: FP1-337]
A Fully Hardware-Based Neural Network Accelerator Using Self-Rectifying Memristor Integrated Passive Crossbar Array
Kanghyeok Jeon1,2, Doo Seok Jeong1, Taeyong Eom2, and Gun Hwan Kim3
1Division of Materials Science and Engineering, Hanyang University, 2Division of Advanced Materials, KRICT, 3Department of System Semiconductor Engineering, Yonsei University
[발표기호: FP1-349]
Graphene Diffusion Barrier를 이용한 PPXC 기반의 RRAM Crossbar Array
이선정1, 김수경1, 김보람1, 구민석2, 박동욱1, 김윤1
1서울시립대학교 전자전기컴퓨터공학과, 2인천대학교 컴퓨터공학과
[발표기호: FP1-358]
CMOS Compatible Short-Term Memory Implementation
윤병호1, 김보람1, 안지훈1, 구민석2, 김윤1
1서울시립대학교 전자전기컴퓨터공학과, 2인천대학교 컴퓨터공학부
[발표기호: FP1-362]
Physical Unclonable Function with Memcapacitor Crossbar Array Using NAND Flash Structure
Min Suk Song, Suhyeon Ahn, Hwiho Hwang, and Hyungjin Kim
Department of Electrical and Computer Engineering, Inha University
[발표기호: FP1-372]
Analysis of Wake-up Degradation in Amorphous InGaZnOx Ferroelectric Thin-Flim Transistor with HfZrOx Gate Insulator
Hwan Jin Kim, Hyojin Yang, Haesung Kim, Ha-Neul Lee, Se Jun Park, Jun Seong Park, Sung-Jin Choi, Dong Myong Kim, Dae Hwan Kim, and Jong-Ho Bae
School of Electrical Engineering, Kookmin University
L. Analog Design
[발표기호: FP1-385]
Design of 16Gb/s/pin 8-Channel Transceiver Using Multiwire Signaling Technique with Skew Compensation for Memory Interface
Sinho Lee, Daeun Yun, Junhak Kim, and Kwanseo Park
Yonsei University
[발표기호: FP1-391]
Direct ToF를 효율적으로 Readout하기 위한 Macro-pixel Readout Circuit
Eun-Chang Lee, Dahwan Park, and Hoochan Lee, Haksoon Kim, Jin-Seon Kim, Min-Seok Shin, and Min-Kyu Kim
SK hynix
M. RF and Wireless Design
[발표기호: FP1-401]
2.4 GHz Low-Power BLE Receiver Front-End for IoT Applications
Sengjun Jo, Hyeonjun kim, and Kuduck Kwon
Department of Electronics Engineering, Kangwon National University
N. VLSI CAD
[발표기호: FP1-403]
Ternary Cell Optimization and Its Impact on VLSI
Hyundong Lee and Taigon Song
School of Electronic and Electrical Engineering, Kyungpook National University
O. System LSI Design
[발표기호: TP1-212]
Two-step Classification Neuron Circuits for Highly Integrated SNN Systems
Dahyeon Youn and Soo Youn Kim
Department of Semiconductor Science, Dongguk University
[발표기호: TP1-215]
50G-PON 용 LDPC 부호기 FPGA 구현
최정원1, 김광옥2, 두경환2, 정환석2, 이영주1
1포항공과대학교 전자전기공학과, 2한국전자통신연구원 입체통신연구소 네트워크연구본부 광네트워크연구실
P. Device for Energy (Solar Cell, Power Device, Battery, etc.)
[발표기호: FP1-417]
Tailoring the Composition and Morphology of RuOx (0≤x≤2) Recombination Layers for High Efficiency Perovskite Tandem Solar Cells
Pil Ju Youn1, Mun Young Woo2, Jun Hong Noh2, and Jeong Hwan Han1
1Department of Material Science and Engineering, Seoul National University of Science and Technology, 2School of Civil, Environmental and Architectural Engineering, Korea University
[발표기호: FP1-424]
Characterization of Bulk Trap Density Using Fully I-V-based Optoelectronic Differential Ideality Factor in Multi-Layer MoS2 FET
Soyeon Kim, Jaewook Yoo, Hyeonjun Song, Hongseung Lee, Seongbin Lim, Minah Park, Seohyeon Park, and Hagyoul Bae
Jeonbuk National University
Q. Metrology, Inspection, Analysis, and Yield Enhancement
[발표기호: TP1-235]
EUV 펠리클에 포집된 임계 크기의 입자가 마스크 이미지 전사특성에 미치는 영향에 대한 실험적 연구
문승찬1,3, 이동기2,3, 홍준호2,3, 안진호1,2,3
1한양대학교 나노반도체공학과, 2한양대학교 신소재공학과, 3EUV-IUCC
[발표기호: TP1-236]
Parameter Optimization for Precision Improvement in Thickness Measured with Spectroscopic Ellipsometry
Inhee Joh, Seojin Park, Myeongrok Oh, Hwanseong Moon, Mita Park, Kyusik Kim, and Tae Dong Kang
AUROS Technology, Inc.
[발표기호: TP1-240]
반사형 대물렌즈를 이용한 분광 타원계측기 편광상태 변화 보정
서선일 , 주기남
조선대학교
[발표기호: TP1-244]
터보분자펌프 성능 평가 지표의 신뢰성 향상을 위한 계측기 보정 및 분산 데이터의 통계학적 프로세싱 방법에 관한 연구
민병현1,3, 임성규2, 문지훈1, 강상우1,3
1한국표준과학연구원 첨단측정장비연구소, 2나노종합기술연구원 나노공정기술부, 3과학기술연합대학원대학교 정밀측정전공
R. Semiconductor Software
[발표기호: TP1-247]
점진적 패리티로 대용량 NAND Flash Memory의 Open Block 문제 완화
Min-Jin Oh1 and Jaeho Kim1,2
1School of Aerospace and Software Engineering, Gyeongsang National University, 2Department of AI Convergence Engineering, Gyeongsang National University
S. Chip Design Contest
[발표기호: TP1-255]
Wide Bandwidth Continuous-Time Noise Shaping SAR ADC
Sein Oh, Gichan Yun, and Minkyu Je
School of Electrical Engineering, KAIST
[발표기호: TP1-296]
Efficient Pillar-Based 3D Object Detection Accelerator
Minjae Lee, Dowon Kim, and Jungwook Choi
Hanyang University
[발표기호: TP1-287]
저전력 센서 어플리케이션을 위한 Glitch-free 포스트 디바이더를 포함한 광대역 주파수 생성기
정상돈, 전정훈
Department of Semiconductor and Display Engineering, Sungkyunkwan University
T. AI
[발표기호: TP1-304]
Dedicated Processing Engines for Depth-wise Separable Convolution
Hyeon Seok Hong1,2 and Hyun Kim1,2
1Department of Electrical and Information Engineering, Seoul National University of Science and Technology, 2Research Center for Electrical and Information Technology, Seoul National University of Science and Technology
U. Bio-Medical
[발표기호: TP1-326]
A Highly Power-efficient LDO with Reliable Low Input Voltage Operation
Woojin Jang and Junghyup Lee
DGIST
V. Quantum Technology
[발표기호: TP1-331]
Constructing Ytterbium Ion Trap System for Quantum Computing Using Cryostat
Junhee Cho, Myunghun Kim, Sehyeon Gwon, Keumhyun Kim, Hyegoo Lee, Sangsoo Han, and Moonjoo Lee
Department of Electrical Engineering, POSTECH
학부생 포스터 세션
[발표기호: TP1-332]
A PVT-Compensated 14-Bit Time-to-Digital Converter for LiDAR Applications
Yongjin Kwon, Yeseung Choi, and Shinwoong Kim
Department of Electrical and Electronic Engineering, Handong Global University
[발표기호: TP1-349]
Interplay between Optoelectronic and Structural Changes during Thermal Annealing of 3D Multi-cation Metal Halide Perovskite Thin Films
Taehyun Kong1, Yongjin Kim1, Heebeom Ahn1, Hyeonmin Choi1, Eunje Park1, Youhyun Nam1, Takhee Lee2, and Keehoon Kang1
1Department of Materials Science and Engineering, Seoul National University, 2Department of Physics and Astronomy, Seoul National University
[발표기호: TP1-351]
High Responsive InSe Based Photodetector Using RF Magnetron Sputtering
Yedam Kim1, Minyoung Choi1, and Byungjin Cho1,2
1Department of Advanced Material Engineering, Chungbuk National University, 2Department of Urban, Energy, and Environmental Engineering, Chungbuk National University
[발표기호: TP1-362]
AI-Based SRAM Design and Performance Analysis for Cache Memory
Junhyeok Kim1, Eunseo Kwon1, Jiyong Kim2, Sanggil Park1, Eunjin Choi1, and Taigon Song3
1School of Electronic and Electrical Engineering, Kyungpook National University, 2Department of Chemistry, Kyungpook National University, 3School of Electronics Engineering, Kyungpook National University
[발표기호: TP1-372]
Contact Resistance in Emerging Semiconductors: A Comparative Study on GaN, In2O3, and ZnO Using Quantum and Semiclassical Methods
Hyeongjun Jang, KiHoon Lee, GeonWoo Kim, Taehyun Kim, and Changwook Jeong
UNIST
[발표기호: TP1-393]
열처리 공정 중 분위기가스 변화를 통한 P-Type 트랜지스터 성능 향상
강평, 오윤주, 홍기현
Chungnam National University
[발표기호: TP1-395]
Enhanced Ferroelectricity of Hf1-xZrxO2 Deposited via Atomic Layer Deposition Using a Novel Precursor with Improved Thermal Stability
Hye-Won Cho1, Hyo-Bae Kim1, Seung-Eon Ahn2,3, and Ji-Hoon Ahn1
1Department of Materials Science and Chemical Engineering, Hanyang University, 2Department of IT·Semiconductor Convergence Engineering, Tech University of Korea, 3Department of Nano&Semiconductor Engineering, Tech University of Korea
[발표기호: TP1-398]
Timing-aware Tier Partitioning for 3D ICs with Critical Path Consideration
Sojung Park and Heechun Park
Kookmin University
[발표기호: TP1-405]
Electrical and Optical Properties of 2D TMD Heterojunction Structures
Jae Hyeop Lee1, Dong Hwi Choi1, Guen Hyung Oh2, Tae Wan Kim2, and Jae Cheol Shin1
1Dongguk University, 2Jeonbuk National University
[발표기호: TP1-422]
Effect of Gate Dielectric Interfacial Layer on the Performance of Organic CMOS Logic Gates
Gyu-Young Kim, Gun-Ryeol Cho, Gab-Jin Sung, Jin-Hong Ahn, Moohyun Kim, Kyoungeun Lee, Yeyun Bae, and Jeongkyun Roh
Department of Electrical Engineering, Pusan National University
[발표기호: TP1-429]
A 32 Gb/s 0.84 pJ/b Referenceless Baud-Rate CDR with Integrated Pattern Decoding
Yoojin Jung, Youngwook Kim, and Kwanseo Park
Yonsei University
[발표기호: TP1-437]
Investigation of the Characteristics of 3D NAND Flash Combining Wave Shaped and Tapered Channel Effects
Jueun Kim, Hyunseo Oh, Hyeongjun So, and Il Hwan Cho
Department of Electronic Engineering, Myongji University
[발표기호: TP1-441]
Design of Wearable Transparent Rectenna System Using Roll-to-Roll Lithography for Energy Harvesting and Microwave Power Transfer
Se Hyun Jeong1, Hyun Woo Jeong1, Jeong-Wook Kim2, Sang-Chan Park1, Young-Dam Kim1, and Jae-Hyuk Ahn1
1Department of Electronics Engineering, Chungnam National University, 2Electronics and Telecommunications Research Institute
[발표기호: TP1-459]
Temperature Effects on Cu-Cu Bonding for Hybrid Bonding
Siye Lee1, Wookyung Lee1, Injoo Kim2, and Sungdong Kim1
1Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, 2Department of Mechanical Design and Robot Engineering, Seoul National University of Science and Technology
[발표기호: TP1-482]
고선형성 가중치 프로그래밍이 가능한 IGZO 2T Synaptic Device
고찬영1, 성수원1, 박성민1, 하태준1, 조현영1, 정윤영1,2,3
1Department of Electrical Engineering, POSTECH, 2Department of Semiconductor Engineering, POSTECH, 3CSTC, POSTECH
[발표기호: TP1-491]
Highly-stable a-IGZO TFT under PBS Condition by Passivation with Hydrogen Plasma Treatment
Jeongha Yoon1, Yewon Jeong1, Taewon Seo1, and Yoonyoung Chung1,2,3
1Department of Electrical Engineering, POSTECH, 2Department of Semiconductor Engineering, POSTECH, 3Center for Semiconductor Technology Convergence, POSTECH
[발표기호: TP1-492]
BaZrO3/MgO Templated Epitaxy Enables Three Orders of Magnitude Conductivity Increase in Ba0.95La0.05SnO3 Films on Al2O3 Substrates, Promoting Very High Transparency and X-band Electromagnetic Shielding
Youngkyoung Ha1, Jingyeong Jeon1, Subhin Hwang1, Judith L. MacManus-Driscoll2, and Shinbuhm Lee1
1DGIST, 2University of Cambridge
[발표기호: TP1-500]
Analysis on Electrical Performance of Nanosheet FET with Asymmetric Inner Spacer Thickness
Won Gi Hong and Hyunwoo Kim
Department of Electrical and Electronics Engineering, Konkuk University
[발표기호: TP1-501]
Solution-Processed Metal-Oxide Thin-Film Transistors Fabricated at Low Temperatures by Metal Ion Doping
Eun-Ha Kim, Chae-Eun Kim, Ho-Jun Cha, Yeon-Eui Lee, Su-Been Kim, Se-Ryong Park, and Tae-Jun Ha
Department of Electronic Materials Engineering, Kwangwoon University
[발표기호: TP1-519]
Analysis of Cell Characteristics Depending on Vertical Channel Structure in 3D NAND Flash
Donghoon Lee1,2, Hyewon Kyung1,2, Jungil Bae1,2, Yunjae Seo1,3, Sanghyuk Lee1,4, Kijun Lim1,2, and Daewoong Kang1
1Next Generation Semiconductor Convergence and Open Sharing System, Seoul National University, 2School of Electrical and Electronics Engineering, Chung-ang University, 3Department of Electronic Engineering, Soongsil University, 4Department of Materials Science and Engineering, Soongsil University