A. Interconnect & Package 분과 WP1-2 논문제목: Liquid Cooling System with TSV for High Power 3D Packages 저자: Manseok Park1, Soojung Baek1, Sungdong Kim2, and Sarah Eunkyung Kim1 소속: 1Graduate School of NID Fusion Technology, Seoul Technology, 2Department of Mechanical System Design Engineering, Seoul Technology TP1-3 논문제목: Atomic Layer Deposition of Mo2N Thin Film as a Diffusion Barrier against Cu 저자: Yujin Jang1, Sun Ju Lee2, Teak-Mo Chung2, Chang Gyoun Kim2, Tae Eun Hong3, and Soo-Hyun Kim1 소속: 1School of Materials Science and Engineering, Yeungnam University, 2Thin Film Materials Group, Korea Research Institute of Chemical Technology, 3Busan Center, Korea Basic Science Institute TP1-5 논문제목: Ultralow Interlayer Dielectrics for the Next Generation System LSI 저자: Sung-Min Cho and Hee-Woo Rhee 소속: Department of Chemical and Biomolecular Engineering, Sogang University B. Patterning 분과 WP1-10 논문제목: Wet Etching Process를 통한 Free-Standing EUV Pellicle Membrane 제작 저자: 김정환1, 이재욱1, 홍성철1, 이승민1, 김정식2, 송현민2, 안진호1,2 소속: 1한양대학교 신소재공학과, 2한양대학교 나노반도체공학과 WP1-13 논문제목: Plasma Etching to forming One-Dimensional Electrical Contact to Molybdenum Disulfide 저자: Zheng Yang, Xiaochi Liu, Min Sup Choi, Faisal Ahmed, Chang Ho Ra, and Won Jong Yoo 소속: SKKU Advanced Institute of Nano-Technology (SAINT), Samsung-SKKU Graphene Center (SSGC), Sungkyunkwan University WP1-19 논문제목: Inductively Coupled Plasma Reactive Ion Etching of Ru Thin Films Using CH4/O2/Ar Gas Mixture 저자: Su Min Hwang, Adrian Adalberto Garay, and Chee Won Chung 소속: Department of Chemistry and Chemical Engineering, Center for Design and Applications of Molecular Catalysts, Inha University C. Materials Growth & Characterization 분과 TP1-10 논문제목: Effect of p-AlGaN Electron Blocking Layer on Efficiency Droop and Identification of the Dominant Mechanism for the Droop in InGaN/GaN MQW LEDs 저자: Nan-Cho Oh, Hye-Jung Yu, Tae-Soo Kim, and Jung-Hoon Song 소속: Department of Physics, Kongju Nat'l University TP1-14 논문제목: Variation of Electrical Characteristics in AlGaN/GaN Schottky Diode with Graphene/Ni/Au Electrodes via Plasma Treatments 저자: Yoonhyung Kim and Jinsub Park 소속: Department of Electronics & Computer Engineering, Hanyang University D. Thin Film Process Technology 분과 TP1-23 논문제목: The Effects of Plasma Frequency on High-k Film Properties in Plasma Enhanced Atomic Layer Deposition 저자: Il-Kwon Oh1, Chang-Mo Yoon1, Gilsang Yoo1,2, Changwan Lee1, Tae Hyung Kim3, Geun Young Yeom3, Hyungjun Kim1, and Han-Bo-Ram Lee4 소속: 1School of Electrical and Electronic Engineering, Yonsei University, 2Samsung Electronics Co., LTD. 3Department of Advanced Materials Engineering, Sungkyunkwan University, 4Department of Material Science Engineering, Incheon National University TP1-32 논문제목: The Study on Increment of Non-Lattice Oxygen Defects by O2/Ar Ratio Variation in Sputtered HfO2 저자: Heedo Na, Jinho Oh, Jimin Lee, Kyumin Lee, and Hyunchul Sohn 소속: Department of Materials Science and engineering, Yonsei University TP1-37 논문제목: Reaction Mechanism Study on Atomic Layer Deposition of Silicon Nitride Films Using Silicon Chlorides and Ammonia 저자: Jae-Min Park, Luchana L. Yusup, Byeol Han, and Won-Jun Lee 소속: Department of Nanotechnology and Advanced Materials Engineering, Sejong University TP1-40 논문제목: Interface Sulfur Passivation using H2S Pre-Deposition Annealing for Atomic-ㅣyer-Deposited HfO2 Film on Ge Substrate 저자: Taejun Seok, Hyunsoo Jin, and Tae Joo Park 소속: Department of Materials Science and Engineering, Hanyang University E. Compound Semiconductors 분과 WP2-7 논문제목: Low-Noise Microwave Performance of AlGaN/GaN HEMTs on SiC with Wide Head T-Shaped Gate 저자: Hyung Sup Yoon, Byoung Gue Min, Ho Kyun Ahn, Jong Min Lee, Dong Min Kang, Sung Il Kim, Chul Won Ju, Hae Cheon Kim, and Jong Won Lim 소속: RF Convergence Components Research Section, IT Components & Materials Research Laboratory, Electronics and Telecommunications Research Institute WP2-14 논문제목: Investigation of Electrical Performance Degradation in p-AlGaN Gate Heterostructure Field Effect Transistors under Various Off-Stress Conditions 저자: Hyo-Seung Choi1, Hun Jeong1, Seung Yup Jang2, Hong Chang Yeoh3, Sang-Hun Song1, and Hyuck-In Kwon 소속: 1School of Electrical and Electronics Engineering, Chung-Ang University, 2MHS Team, System IC R&D Laboratory, LG Electronics, 3Analog Devices Inc. WP2-15 논문제목: Interface Engineering for InGaAs MIS Capacitor with Al2O3 Employing PEALD-SiNx as an Interfacial Layer 저자: Myoung-Jin Kang, Min-Seok Kim, and Kwang-Seok Seo 소속: Department of Electrical Engineering and Computer Science, Seoul National University F. Silicon Device and Integration Technology 분과 TP1-45 논문제목: Nano Imprint로 형성된 Synaptic 소자 및 Spike Time Dependent Plasticity (STDP) 특성 평가 저자: Youngin Gil and Changhwan Choi 소속: Division of Materials Science and Engineering, Hanyang University G. Device & Process Modeling, Simulation and Reliability 분과 WP2-24 논문제목: Extraction of Location and Energy Level of Oxide Trap Leading to Random Telegraph Noise in Gate-Induced Drain Leakage of p-MOSFET 저자: Hyunsoo Kim, Sung-Won Yoo, Youngsoo Seo, and Hyungcheol Shin 소속: Inter-university Semiconductor Research Center (ISRC) and School of Electrical Engineering and Computer Science, Seoul National University WP2-25 논문제목: The Comparison of Electrical Characteristics Between Nanoplate Fet and FinFET for 5 nm node Technology 저자: Duckseoung Kang, Jong-su Kim, and Hyungcheol Shin 소속: Inter-university Semiconductor Research Center (ISRC) and School of Electrical Engineering and Computer Science, Seoul National University WP2-31 논문제목: Effects of Oxygen Adatoms on the Atomic and Electronic Structures of Various Ge Surfaces by Ab-Initio Study 저자: Liu Kai1,2, Cheol Seong Hwang2, and Jung-Hae Choi1 소속: 1Electronic Materials Research Center, Korea Institute of Science and Technology, 2Department of Materials Science and Engineering, Seoul National University H. Display and Imaging Technologies 분과 TP1-52 논문제목: Structure and Electrical Properties of Nitrogen Doped ZnO Thin Film by Atomic Layer Deposition 저자: 김수현, 편정준, 조철진, 김성근, 김진상 소속: 한국과학기술연구원 전자재료연구센터 TP1-54 논문제목: Electrochromic Mirror using Viologen-Anchored Nanoparticle 저자: Han Na Kim1,2, Seong-Mok Cho1, Chil Seong Ah1, Juhee Song1, Hojun Ryu1, and Tae-Youb Kim1,2 소속: 1ETRI, 2University of Science and Technology I. MEMS & Sensor Systems 분과 WP1-24 논문제목: 민감도 향상을 위한 NDIR [CO] _2Sensor 연구 저자: Minki Woo, Sang Wook Han, and Sung Moon 소속: Korea Institute of Science and Technology WP1-37 논문제목: Surface Potential Characterization of Original and Regrown Amyloid Fibrils 저자: Wonseok Lee1, Hyungbeen Lee1, Myeonggu Son1, Gyudo Lee1, Sang Woo Lee1, and Dae Sung Yoon2 소속: 1Department of Biomedical Engineering, Yonsei University, 2School of Biomedical Engineering, Korea University WP1-43 논문제목: Taste Sensor based on Cascoded Compatible Lateral Bipolar Transistor (C-CLBT) for Detection of Sweetness 저자: Jin-Bum Kwon, Hyun-Min Jeong, Sang-Won Lee, Jae-Sung Lee, Hyurk-Choon Kwon, and Shin-Won Kang 소속: School of Electronics Engineering, College of IT Engineering, Kyungpook National University WP1-44 논문제목: Fabrication of Silicon Microlens Array on Flexible Substrates using a Transfer Printing 저자: Hyungi Park, Myunggyu Shin, and Young Min Song 소속: Department of Electronic Engineering, Pusan National University WP1-50 논문제목: Flexible One Diode-One Block Copolymer Incorporated Phase Change Memories Array on Plastic Substrates 저자: Beom Ho Mun, Byoung Kuk You, Se Ryeun Yang, Hyeon GyunYoo, Myunghwan Byun, Yeon Sik Jung, and Keon Jae Lee 소속: Department of Materials Science and Engineering, KAIST J. Nano-Science & Technology 분과 WP1-56 논문제목: Photoresponse Characteristics of MoS2 Field Effect Transistors under Gate-Bias Stress Conditions 저자: Kyungjune Cho, Tae-Young Kim, Woanseo Park, and Takhee Lee 소속: Department of Physics and Astronomy, Seoul National University WP1-62 논문제목: Top Gate Graphene FET의 Fermi level과 계면결함 밀도의 상관관계 연구 저자: 정욱진, 김윤지, 김용훈, 김소영, 이병훈 소속: Center for Emerging Electric Devices and Systems, School of Material Science and Engineering, Gwangju Institute of Science and Technology TP1-59 논문제목: Mutual Interaction Observed in Hydrothermal Growth of One-Dimensional ZnO Nanorod Arrays 저자: Jung Min Lee, Won Woo Lee, Sungwoong Kim, Su Han Kim, and Won Il Park 소속: Division of Materials Science and Engineering, Hanyang University TP1-63 논문제목: Inorganic-based Flexible Electronics for System on Plastic 저자: Hyeon Gyun Yoo, Seungjun Kim, and Keon Jae Lee 소속: Department of Materials Science and Engineering, KAIST TP1-68 논문제목: Inkjet-Printed Source/Drain Contact for Solution-Processed Single-Walled Carbon Nanotube Thin-Film Transistors 저자: Hyeonggyu Kim, Taehoon Kim, Narkhyeon Seong, Jewook Ha, and Yongtaek Hong 소속: Department of Electrical and Computer ngineering and Inter-University Semiconductor Research Center (ISRC), Seoul National University K. Memory (Design & Process Technology) 분과 WP2-53 논문제목: Programming Pulse Width Variation and Its Microstructural Model of Phase-Change Memory 저자: Gwihyun Kim, Sanghyeon Lee, and Seung Jae Baik 소속: Department of Electrical, Electronic, and Control Engineering, Hankyong National University WP2-54 논문제목: Influence of Electron and Hole Distribution on Embedded SONOS Nonvolatile Memory 저자: Da Som Kim1, Tae Ho Lee2, Young Jun Kwon2, Jae Gwan Kim2, Sung Kun Park2, In Wook Cho2, Kyung Dong Yoo2, Gyu Han Yun1, and Woo Young Choi1 소속: 1 Department of Electronic Engineering, Sogang University, 2System IC Division, SK Hynix Inc. L. Analog Design 분과 WP2-56 논문제목: A 1-Gb/s Digital Transmitter with 3-tap FIR Pre-Emphasis in 0.13-um CMOS 저자: Chaerin Hong, Kyungmin Lee, Xiao Ying, Hanbyul Choi, Seung-Hoon Kim, and Sung Min Park 소속: Department of Electronics Engineering, Ewha Womans University WP2-63 논문제목: Portable Sensor Platform using Constant Current Source 저자: Yongjun Hwang, Seongwook Choi, Sangwoo Lee, and Youngjune Park 소속: Department of Electrical and Computer Engineering, Seoul National University N. VLSI CAD 분과 WP2-67 논문제목: Event-Driven Simulation of Input-Dependent Nonlinear Behaviors 저자: Jieun Jang and Jaeha Kim 소속: Department of Electrical and Computer Engineering, Inter-university Semiconductor Research Center, Seoul National University O. System LSI Design 분과 WP1-64 논문제목: High-Speed Baseband Modem for 60 GHz Proximity Wireless Communications 저자: Ik-Jae Chun1, Hoo-Sung Lee1, Moon-Sik Lee1, and Ji-Hoon Kim2 소속: 1Wireless Proximity Communications Research Section, ETRI, 2Division of Electrical and Information Technology Engineering, Chungnam National University P. Device for Energy 분과 WP2-70 논문제목: Chemically-Sintered, Binder-Free TiO2 Films for Low-Temperature Photoelectrodes 저자: Jaewon Jang and Moon-Ho Ham 소속: School of Materials Science and Engineering, Gwangju Institute of Science and Technology WP2-79 논문제목: Enhanced Field-Effect Passivation Performance of Atomic-Layer-Deposited Al2O3 Layer for Si Nanostructured Solar Cells using Interface S Incorporation 저자: Daewoong Kim1, Jaewon Song2, Jung-Ho Lee2, and Tae Joo Park1 소속: 1Department of Materials Science and Engineering, Hanyang University, 2Department of Chemical Engineering, Hanyang University Q. Metrology, Inspection, and Yield Enhancement 분과 TP1-74 논문제목: Wafer Defect Inspection using Component Tree of SEM Images 저자: Sunghyon Kim1, Minwoo Kim2, and Il-seok Oh1,2 소속: 1Department of Nano Technology, Chonbuk National University, 2Department of Computer Engineering Graduate School, Chonbuk National University TP1-80 논문제목: 전자 빔을 이용한 미세 오정렬 계측 시스템 저자: 김형복1, 박민웅1, 조중휘1, 강명주2, 오승철3 소속: 1인천대학교, 2서울대학교, 3오로스테크놀로지